Voice200infinityAll compounds. All-in-One. Fast.
Made specially for the Semiconductor industry.
One Analyzer. Many contaminants.
The Voice200infinity analyzer covers the range of key contaminations to pptv-levels in a single, flexible, online monitorting tool. Monitor your photo area for PGMEA and Acetic acide with the same analyzer you use to monitor the Copper process for H2S.
- Refractories TMS,TEOS,PH3...
- Condensable and Non-Condensable Organics PGMEA, Toluene, IPA, DBP...
- Molecular Acids HF, HCl, Acetic acid, SO2...
- Molecular Bases NH3...
- A single analytical tool for chemically diverse compounds – both organic and inorganic
- Low-pptv detection limits for most organic compounds with measurement time of<10s/compound
- <500pptv detection limits for most inorganic compounds
- Automated validation to ensure measurement stability
- Available for integration into a variety of sample delivery systems
Performance for Representative Compounds
Interested in something else? Contact us for data on the 1000+ additiona compounds in the Syft library.