Semiconductor
Material Emissions
Syft’s real-time VOC detection and AMC gas monitoring enhances the fab operators’ ability to control the FOUP thereby minimizing wafer defects. SIFT-MS is a trace gas analyzer technology that is straightforward to use and provides instant, continuous results. VOC testing and identification of inorganics in the fab has never been easier.
Comprehensive and rapid FOUP screening
The rapid analysis provided by SIFT-MS instruments can be utilized to screen front-opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers. Enhanced screening minimizes risk of wafer contamination by volatile compounds released from FOUP materials. This figure shows rapid screening of a wide range of airborne molecular contaminants (AMCs) in a fully assembled FOUP. Species targeted in a single method include aldehydes, organochlorine and organosulfur species, as well as the organometallic compound, iron pentacarbonyl. Each data cycle generates concentration data that are the equivalent of a complete chromatographic analysis. But the timescale of SIFT-MS is tens of seconds for results, rather than tens of minutes from chromatographic techniques.
Material Emissions benefits
Continuous AMC screening with instant contaminant detection
The widest range of emitted volatiles detected with a single instrument
High sensitivity and selectivity
Low cost per data point
Easy to operate and to interpret results
Material Emissions resources
Formaldehyde in Air (sample bags)
Direct analysis using selected ion flow tube mass spectrometry (SIFT-MS) enables real-time monitoring of formaldehyde to sub-part-per-billion concentrations. SIFT-MS simplifies and accelerates both sampling and analysis of formaldehyde, providing 25-fold throughput enhancements.
Formaldehyde: Real-time, Sensitive Gas and Headspace Analysis Using SIFT-MS
Various exciting applications of SIFT-MS formaldehyde analysis will be presented, including candle flame analysis, material emissions and evaluation of materials that scavenge gaseous formaldehyde.
SIFT-MS Selected Ion Flow Tube Mass Spectrometry
Learn about direct mass spectrometry by SIFT-MS which provides real-time, quantitative analysis of volatile compounds with trace-level sensitivity. There are also no requirements of chromatography, pre-concentration, or sample prep! SIFT-MS is easy to use and interpret data.
What’s in Your Fab Air?
SIFT-MS provides online AMC monitoring solutions for Fab environmental control. Detect volatile organic compounds (VOCs) and inorganic acids instantly with trace level sensitivity. Learn how SIFT-MS provides real-time detection of airborne molecular contaminants through a single instrument solution. Never miss a contamination event again.
A Sensory Expert Shares His Experience with SIFT-MS
We asked Mike McGinley, President, St. Croix Sensory, Inc. about his experience using SIFT-MS. Hear what he had to say about the speed of analysis and flexibility inherent to Syft's product solutions.
The Latest Innovation of Real-Time, High-Throughput Volatile Impurities Analysis by SIFT-MS
Join us for this webinar to learn about Syft Tracer, the latest advancement of real-time, trace gas analysis by SIFT-MS which launched at Pittcon 2023. Hear how the recent product innovations unlock analytical bottlenecks and enable faster decisions to be made in critical process steps.