Semiconductor
Material Emissions
Syft’s real-time detection and analysis of AMCs enhances the fab operators’ ability to control the FOUP thereby minimizing wafer defects.
Comprehensive and rapid FOUP screening
The rapid analysis provided by SIFT-MS instruments can be utilized to screen front-opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers. Enhanced screening minimizes risk of wafer contamination by volatile compounds released from FOUP materials. This figure shows rapid screening of a wide range of airborne molecular contaminants (AMCs) in a fully assembled FOUP. Species targeted in a single method include aldehydes, organochlorine and organosulfur species, as well as the organometallic compound, iron pentacarbonyl. Each data cycle generates concentration data that are the equivalent of a complete chromatographic analysis. But the timescale of SIFT-MS is tens of seconds for results, rather than tens of minutes from chromatographic techniques.
Material Emissions benefits
Continuous AMC screening with instant contaminant detection
The widest range of emitted volatiles detected with a single instrument
High sensitivity and selectivity
Low cost per data point
Easy to operate and to interpret results
Material Emissions resources
Formaldehyde: Real-time, Sensitive Gas and Headspace Analysis Using SIFT-MS
Analysis of Volatile Emissions from Polymers and Paperboard
Cleanroom Air Quality Monitoring
Paperboard Volatiles 3 - Odor Rating
Rapid Odor Screening of Paperboard using Static Headspace-SIFT-MS
A Sensory Expert Shares His Experience with SIFT-MS
We asked Mike McGinley, President, St. Croix Sensory, Inc. about his experience using SIFT-MS. Hear what he had to say about the speed of analysis and flexibility inherent to Syft's product solutions.
The Latest Innovation of Real-Time, High-Throughput Volatile Impurities Analysis by SIFT-MS
Join us for this webinar to learn about Syft Tracer, the latest advancement of real-time, trace gas analysis by SIFT-MS which launched at Pittcon 2023. Hear how the recent product innovations unlock analytical bottlenecks and enable faster decisions to be made in critical process steps.