Semiconductor Material Emissions

Syft’s real-time detection and analysis of AMCs enhances the fab operators’ ability to control the FOUP thereby minimizing wafer defects.

Comprehensive and rapid FOUP screening

The rapid analysis provided by SIFT-MS instruments can be utilized to screen front-opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers. Enhanced screening minimizes risk of wafer contamination by volatile compounds released from FOUP materials. This figure shows rapid screening of a wide range of airborne molecular contaminants (AMCs) in a fully assembled FOUP. Species targeted in a single method include aldehydes, organochlorine and organosulfur species, as well as the organometallic compound, iron pentacarbonyl. Each data cycle generates concentration data that are the equivalent of a complete chromatographic analysis. But the timescale of SIFT-MS is tens of seconds for results, rather than tens of minutes from chromatographic techniques.

Material Emissions benefits

Continuous AMC screening with instant contaminant detection

The widest range of emitted volatiles detected with a single instrument

High sensitivity and selectivity

Low cost per data point

Easy to operate and to interpret results

Material Emissions resources

Whitepaper

Formaldehyde in Air (sample bags)

High-Throughput Formaldehyde Analysis in Air Using Direct Mass Spectrometry

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Application Note

Paperboard Volatiles 2 - MHE

Rapid Determination of Volatile Compound Content using Multiple Headspace Extraction-SIFT-MS

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Application Note

Formaldehyde Thermal Extraction with TD-SIFT-MS

Time-Resolved Thermal Extraction of Residual Formaldehyde Using Thermal Desorption-SIFT-MS

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Webinar

Formaldehyde: Real-time, Sensitive Gas and Headspace Analysis Using SIFT-MS

Concerns about the toxicity of formaldehyde and its ubiquity continue to increase.
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Application Note

Residual Monomer Analysis

High-Throughput Residual Monomer
Analysis, Using SIFT-MS

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Webinar

Analysis of Volatile Emissions from Polymers and Paperboard

Food and pharmaceutical products are susceptible to contamination from packaging – whether from polymeric materials, printing inks or paperboard.
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Application Note

Paperboard Volatiles 1 - Screening

Rapid Screening of Volatile Compounds in Paperboard using Static Headspace-SIFT-MS

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Brochure

Semiconductor Industry Solutions

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Application Note

Semiconductor FOUP Screening

High-Throughput FOUP and Components Screening, Using SIFT-MS

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Application Note

Semiconductor AMC Monitoring

Real-Time, Comprehensive, and Sensitive Airborne Molecular Contaminant (AMC) Analysis, Using SIFT-MS

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Webinar

Cleanroom Air Quality Monitoring

Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below).
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Application Note

Semiconductor Bulk Gas Analysis

Untargeted Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry Case Study

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Application Note

Paperboard Volatiles 3 - Odor Rating

Rapid Odor Screening of Paperboard using Static Headspace-SIFT-MS

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Application Note

Automated SIFT-MS - An Overview

Automated Selected Ion Flow Tube Mass Spectrometry [SIFT-MS]

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