Semiconductor Material Emissions

Syft’s real-time VOC detection and AMC gas monitoring enhances the fab operators’ ability to control the FOUP thereby minimizing wafer defects.  SIFT-MS is a trace gas analyzer technology that is straightforward to use and provides instant, continuous results.  VOC testing and identification of inorganics in the fab has never been easier. 

Comprehensive and rapid FOUP screening

The rapid analysis provided by SIFT-MS instruments can be utilized to screen front-opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers. Enhanced screening minimizes risk of wafer contamination by volatile compounds released from FOUP materials. This figure shows rapid screening of a wide range of airborne molecular contaminants (AMCs) in a fully assembled FOUP. Species targeted in a single method include aldehydes, organochlorine and organosulfur species, as well as the organometallic compound, iron pentacarbonyl. Each data cycle generates concentration data that are the equivalent of a complete chromatographic analysis. But the timescale of SIFT-MS is tens of seconds for results, rather than tens of minutes from chromatographic techniques.

Material Emissions benefits

Continuous AMC screening with instant contaminant detection

The widest range of emitted volatiles detected with a single instrument

High sensitivity and selectivity

Low cost per data point

Easy to operate and to interpret results

Material Emissions resources

Whitepaper

Formaldehyde in Air (sample bags)

Direct analysis using selected ion flow tube mass spectrometry (SIFT-MS) enables real-time monitoring of formaldehyde to sub-part-per-billion concentrations. SIFT-MS simplifies and accelerates both sampling and analysis of formaldehyde, providing 25-fold throughput enhancements.

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Application Note

Formaldehyde Thermal Extraction with TD-SIFT-MS

This application note describes how challenging formaldehyde residue analysis becomes routine by utilizing automated thermal desorption-selected ion flow tube mass spectrometry (TD-SIFT-MS).

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Webinar

Formaldehyde: Real-time, Sensitive Gas and Headspace Analysis Using SIFT-MS

Various exciting applications of SIFT-MS formaldehyde analysis will be presented, including candle flame analysis, material emissions and evaluation of materials that scavenge gaseous formaldehyde.

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Application Note

Semiconductor FOUP Screening

The broad-spectrum and high-throughput analysis provided by SIFT-MS, coupled with high sensitivity and selectivity provides simple, real-time analysis of volatile emissions from front-opening unified pods (FOUPs) and components.

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Brochure

SIFT-MS Selected Ion Flow Tube Mass Spectrometry

Learn about direct mass spectrometry by SIFT-MS which provides real-time, quantitative analysis of volatile compounds with trace-level sensitivity.  There are also no requirements of chromatography, pre-concentration, or sample prep!  SIFT-MS is easy to use and interpret data. 

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Brochure

What’s in Your Fab Air?

SIFT-MS provides online AMC monitoring solutions for Fab environmental control.  Detect volatile organic compounds (VOCs) and inorganic acids instantly with trace level sensitivity. Learn how SIFT-MS provides real-time detection of airborne molecular contaminants through a single instrument solution.  Never miss a contamination event again.

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Webinar

A Sensory Expert Shares His Experience with SIFT-MS

We asked Mike McGinley, President, St. Croix Sensory, Inc. about his experience using SIFT-MS.  Hear what he had to say about the speed of analysis and flexibility inherent to Syft's product solutions.

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Webinar

The Latest Innovation of Real-Time, High-Throughput Volatile Impurities Analysis by SIFT-MS

Join us for this webinar to learn about Syft Tracer, the latest advancement of real-time, trace gas analysis by SIFT-MS which launched at Pittcon 2023. Hear how the recent product innovations unlock analytical bottlenecks and enable faster decisions to be made in critical process steps.

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Brochure

Taking Real-Time Mass Spec on the Go

Syft Explorer is a comprehensive solution for making real-time mass spec measurements anywhere on-site.  It includes next-gen SIFT-MS, onboard clean dry air, and automatic power management bundled in a mobile format.  Never miss a contamination event again!

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Webinar

An Analytical Chemistry Research Fellow Shares His Experience with SIFT-MS

We asked Geraint Morgan, Research Fellow at The Open University, about his experience using SIFT-MS.  He discusses how his Syft Tracer has opened up new ways of looking at samples that are difficult to analyze by traditional methods such as formaldehyde and other aldehydes. 

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