Semiconductor Bulk Gas Analysis

Each step in your production process can be tightly controlled by SIFT-MS real-time trace gas detection whether it’s in the plenum, cleanroom, interstitial space, or subfab. Never waste a production batch again. 

Instant detection of trace impurities in bulk gases

Semiconductor fabrication plants consume a wide variety of high-quality bulk gases. Over a hundred pure gases and specialty gas mixtures are supplied to any given fab and all supplied gases must meet strict purity requirements. Continuous monitoring of bulk and specialty gases can play an essential role in reducing the incidence of impurity-related yield loss. SIFT-MS instruments can be integrated with existing online gas monitoring systems, enabling faster and more thorough detection of trace volatile impurities in bulk and specialty gases. Ensure the purity of gases in your production environment through instant contamination detection with SIFT-MS.

Bulk Gas benefits

Continuous, high-resolution and high sensitivity detection of trace gases

24/7 operation with minimal downtime (<1% downtime for validation)

Batch analysis option

Simple integration with existing sample delivery infrastructure (single or multiple point)

Untargeted screening option using SIFT-MS scan mode and multivariate statistical processing

Sample customers


Bulk Gas resources

Brochure

Semiconductor Industry Solutions

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Application Note

Semiconductor FOUP Screening

High-Throughput FOUP and Components Screening, Using SIFT-MS

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Application Note

Semiconductor AMC Monitoring

Real-Time, Comprehensive, and Sensitive Airborne Molecular Contaminant (AMC) Analysis, Using SIFT-MS

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Application Note

Semiconductor Bulk Gas Analysis

Untargeted Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry Case Study

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Webinar

Instant Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry

SIFT-MS can continuously analyze volatiles that indicate non-conformance of raw materials, such as bulk gases utilized in semiconductor manufacture.
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