Instant detection of trace impurities in bulk gases
Semiconductor fabrication plants consume a wide variety of high-quality bulk gases. Over a hundred pure gases and specialty gas mixtures are supplied to any given fab and all supplied gases must meet strict purity requirements. Continuous monitoring of bulk and specialty gases can play an essential role in reducing the incidence of impurity-related yield loss. SIFT-MS instruments can be integrated with existing online gas monitoring systems, enabling faster and more thorough detection of trace volatile impurities in bulk and specialty gases. Ensure the purity of gases in your production environment through instant contamination detection with SIFT-MS.
Bulk Gas benefits
Continuous, high-resolution and high sensitivity detection of trace gases
24/7 operation with minimal downtime (<1% downtime for validation)
Batch analysis option
Simple integration with existing sample delivery infrastructure (single or multiple point)
Untargeted screening option using SIFT-MS scan mode and multivariate statistical processing