Semiconductor
Online AMC monitoring solutions for semiconductor fabrication environmental control. Detect volatile organic compounds (VOCs) and inorganic airborne molecular contaminants (AMCs) in real-time and maximize your production yield.
The most comprehensive online measurement of trace gases for high product yields.
Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. The presence of airborne molecular contaminants (AMCs) in fabrication environments can ruin production batches. SIFT-MS provides real-time trace gas analysis of AMCs with the broadest range of volatile organic compound (VOCs) and inorganic gas detection available in a single instrument.
Semiconductor applications and use cases
Syft is the answer to your Semiconductor AMC monitoring issues
Industry issue
Continuous monitoring of AMCs is critical to ensuring the integrity of fab production environments. Legacy detectors and sensors tend to be slow or inflexible, leading to missed AMC contamination events that damage precious product.
Competitive benefit
SIFT-MS covers a wide range of fab monitoring applications with fast, flexible solutions that can keep up with changing process monitoring needs over the lifetime of your fab. Each step in your production process can be tightly controlled by SIFT-MS real-time trace gas detection whether it’s in the plenum, cleanroom, interstitial space, or subfab. Monitor for ammonia, ethanolamine, SOX compounds, or any other AMCs.
Industry impact
Real-time, rapid, and dynamic trace gas detection ensures that AMC contamination events are not missed, avoiding loss of yield and production batch write-offs.Sample Customers
Semiconductor resources
Webinar
Cleanroom Air Quality Monitoring
Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below).
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Webinar
Instant Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry
SIFT-MS can continuously analyze volatiles that indicate non-conformance of raw materials, such as bulk gases utilized in semiconductor manufacture.
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