The most comprehensive online measurement of trace gases for high product yields.
Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. The presence of airborne molecular contaminants (AMCs) in fabrication environments can ruin production batches. SIFT-MS provides real-time trace gas analysis of AMCs with the broadest range of volatile organic compound (VOCs) and inorganic gas detection available in a single instrument.