The most comprehensive online measurement of trace gases for high product yields.
Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. The presence of airborne molecular contaminants (AMCs) in fabrication environments can ruin production batches. SIFT-MS provides real-time trace gas analysis of AMCs with the broadest range of volatile organic compound (VOCs) and inorganic gas detection available in a single instrument.
Semiconductor applications and use cases
SIFT-MS provides rapid, high-sensitivity analysis of a wide range of AMCs, greatly reducing product loss and equipment failure.Read More
SIFT-MS can be integrated with existing online gas monitoring systems, enabling faster and more thorough detection of trace volatile impurities in bulk and specialty gases.Read More
The rapid analysis provided by SIFT-MS instruments can be utilized to screen front opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers.Read More