Semiconductor

Online AMC monitoring solutions for semiconductor fabrication environmental control. Detect volatile organic compounds (VOCs) and inorganic airborne molecular contaminants (AMCs) in real-time and maximize your production yield.

The most comprehensive online measurement of trace gases for high product yields.

Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. The presence of airborne molecular contaminants (AMCs) in fabrication environments can ruin production batches. SIFT-MS provides real-time trace gas analysis of AMCs with the broadest  range of volatile organic compound (VOCs) and inorganic gas detection available in a single instrument.

Semiconductor applications and use cases

Cleanroom Monitoring

SIFT-MS provides rapid, high-sensitivity analysis of a wide range of AMCs, greatly reducing product loss and equipment failure.

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Bulk Gas

SIFT-MS can be integrated with existing online gas monitoring systems, enabling faster and more thorough detection of trace volatile impurities in bulk and specialty gases.

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Material Emissions

The rapid analysis provided by SIFT-MS instruments can be utilized to screen front opening unified pod (FOUP) components and completed assemblies prior to their use for transporting wafers.

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Syft is the answer to your Semiconductor AMC monitoring issues

Industry issue

Continuous monitoring of AMCs is critical to ensuring the integrity of fab production environments. Legacy detectors and sensors tend to be slow or inflexible, leading to missed AMC contamination events that damage precious product.

Competitive benefit

SIFT-MS covers a wide range of fab monitoring applications with fast, flexible solutions that can keep up with changing process monitoring needs over the lifetime of your fab. Each step in your production process can be tightly controlled by SIFT-MS real-time trace gas detection whether it’s in the plenum, cleanroom, interstitial space, or subfab. Monitor for ammonia, ethanolamine, SOX compounds, or any other AMCs.

Industry impact

Real-time, rapid, and dynamic trace gas detection ensures that AMC contamination events are not missed, avoiding loss of yield and production batch write-offs.

Sample customers


Semiconductor resources

Brochure

Semiconductor Industry Solutions

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Application Note

Semiconductor FOUP Screening

High-Throughput FOUP and Components Screening, Using SIFT-MS

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Application Note

Semiconductor AMC Monitoring

Real-Time, Comprehensive, and Sensitive Airborne Molecular Contaminant (AMC) Analysis, Using SIFT-MS

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Webinar

Cleanroom Air Quality Monitoring

Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below).
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Application Note

Semiconductor Bulk Gas Analysis

Untargeted Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry Case Study

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Webinar

Instant Detection of Non-Conforming Raw Materials Using SIFT-MS: A Semiconductor Industry

SIFT-MS can continuously analyze volatiles that indicate non-conformance of raw materials, such as bulk gases utilized in semiconductor manufacture.
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Brochure

What’s in Your Fab Air?

Online AMC monitoring solutions for Fab environmental control

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